US Patent 7919048 Cellular microarray and its microfabrication method

A cellular microarray is disclosed, which has a substrate, multiple first conductive lines, multiple second conductive lines, and multiple PIREs arranged on the surface of the substrate in an array. Each PIRE includes multiple first ring-shaped electrodes, and multiple second ring-shaped electrodes. The first ring-shaped electrodes, and the second ring-shaped electrodes are located on the surface of the substrate alternately in each PIRE. Moreover, the outermost ring-shaped electrodes of any two adjacent feather-shaped electrodes are different. The disclosed cellular microarray can adhere the cells rapidly and uniformly, increase the output of manufacturing, and reduce the cost for manufacturing and application.