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US Patent 7916291 Apparatus and method for spectroscopy

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
1
Date Filed
November 6, 2009
1
Date of Patent
March 29, 2011
1
Patent Application Number
12614281
1
Patent Citations Received
‌
US Patent 11906753 Optical system in particular for microlithography
2
Patent Inventor Names
Barry Gelernt
1
Pramod Kumar Khulbe
1
Thomas D. Milster
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
7916291
1
Patent Primary Examiner
‌
Tarifur Chowdhury
1

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