Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Thomas Kief0
Venkateswara Rao Inturi0
Date of Patent
March 29, 2011
Patent Application Number
12025275
Date Filed
February 4, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
High magnetic moment films FeCo(X, Y), where X is a transition metal element and Y is a rare earth element are formed using off-axis static deposition techniques. The films have tunable magnetic anisotropy from 0 Oe to greater than 500 Oe that are thermally stable beyond nominal photoresist curing temperatures. By using off-axis static deposited FeCo(X, Y) films as seed layers to normally deposited FeCo films, inplane anisotropy and the magnetic moment can be controlled for specific design needs. Epitaxial-like growth (column-to-column matching) from the off-axis static FeCo(X,Y) seed layers to normally deposited FeCo films is attributed to sustained anisotropy in the entire film.
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