Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mitsunori Nakamori0
Noritaka Uchida0
Date of Patent
March 29, 2011
0Patent Application Number
116023980
Date Filed
November 21, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A liquid processing method includes: placing a plate adjacently to at least one of surfaces of a target substrate, and supplying a process liquid into a gap between the plate and the target substrate, thereby forming a liquid film of the process liquid; subjecting the target substrate to a process using a state with the liquid film of the process liquid thus formed; and supplying a gas to the liquid film, thereby breaking the liquid film, after finishing the process.
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