US Patent 7913643 Film forming apparatus and film forming method
Patent 7913643 was granted and assigned to Fujikura on March, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.
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Patent Inventor Names
Kenji Goto0
Nobuo Tanabe0
Takuya Kawashima0
Yasuo Suzuki0
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US Patent 07913643 Film forming apparatus and film forming method US Patent 7913643 Film forming apparatus and film forming method
Infobox
Patent Number
079136430
Patent Number
79136430
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
079136430
Date of Patent
March 29, 2011
0Patent Application Number
120469630
Date Filed
March 12, 2008
0Official Website
Patent Primary Examiner
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US Patent 07913643 Film forming apparatus and film forming method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07913643
Date of patent
March 29, 2011
Patent application number
12046963
Date Filed
March 12, 2008
Patent primary examiner
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