US Patent 7910900 Collector for an illumination system

Patent 7910900 was granted and assigned to Carl Zeiss SMT on March, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Carl Zeiss SMT

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

79109000

Patent Inventor Names

Udo Dinger0

Ralf Stuetzle0

Date of Patent

March 22, 2011

Patent Application Number

117810100

Date Filed

July 20, 2007

Patent Primary Examiner

‌

Bernard E Souw

Patent abstract

Collectors with mirror shells arranged inside each other, illumination systems equipped with such collectors, projection exposure apparatuses equipped with such illumination systems, methods of manufacturing microelectronic components with such projection exposure apparatuses, and related systems, components and methods are disclosed.