US Patent 7910886 Sample dimension measuring method and scanning electron microscope
Patent 7910886 was granted and assigned to Hitachi on March, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 19, 2007
Date of Patent
March 22, 2011
Patent Application Number
11902088
Patent Inventor Names
Takashi Iizumi
0
Hiroki Kawada
0
Tadashi Otaka
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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