Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vinayak Tilak0
Jody Alan Fronheiser0
Kevin Sean Matocha0
Peter Micah Sandvik0
Date of Patent
March 15, 2011
0Patent Application Number
122513410
Date Filed
October 14, 2008
0Patent Primary Examiner
Patent abstract
There is provided a method for dimension profiling of a semiconductor device. The method involves incorporating a feature comprising a detectable element into the device, and thereafter detecting the detectable element to determine a dimension of the feature. This information can be used for the determination of a dimension of buried channels, and also for end-point detection of CMP processes.
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