Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Scott Kulas0
Jim Woodruff0
Joe Jamello0
Ray Ellis0
Albert J. Crespin0
Emily True0
Date of Patent
March 8, 2011
0Patent Application Number
122867620
Date Filed
October 2, 2008
0Patent Primary Examiner
Patent abstract
An apparatus for measuring the relative positions of frontside and backside alignment marks located on opposite sides of a substrate is disclosed. The apparatus includes upper and lower optical systems that allow for simultaneous imaging of frontside and backside alignment marks. The frontside and backside alignment mark images are processed to determine the relative position of the marks, as a measurement of the alignment and/or overlay performance of the tool that formed the marks on the substrate.
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