US Patent 7898710 High precision thin film scribing device

A high precision refractive scanner includes a light source that generates a light beam, a lens pair including a stationary plano-concave lens and a movable plano-convex lens, a thin film-covered panel, and an F-theta lens that focuses the light beam that passes through the lens pair onto the panel. The plano-convex lens has an initial position where a first edge is in refracting relation to the light beam and a final position where a second edge is in refracting relation to the light beam. The plano-convex lens rotates about a pivot point that represents the origin of the respective radii of curvatures of both lenses with a nominal air gap between the two lenses. Rotation of the plano-convex lens causes the light beam to be refracted over a predetermined scan angle. A focal spot forms a scribe when it travels from a first to a second edge of the panel.