Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
James Spiros Nakos0
Nicholas Mone, Jr.0
Tushar Desai0
Alan Michael Chandler0
Ellis Craig Hayford0
Date of Patent
March 1, 2011
0Patent Application Number
121681680
Date Filed
July 7, 2008
0Patent Primary Examiner
Patent abstract
An apparatus. The apparatus including: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
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