Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 1, 2011
Patent Application Number
11833236
Date Filed
August 3, 2007
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The present invention provides a metal-insulator-metal capacitor, which comprises a semiconductor substrate; an interlayer dielectric layer disposed on the semiconductor substrate; and an insulation trench and two metal trenches all running through the interlayer dielectric layer and allowing the semiconductor substrate to be exposed; wherein the metal trenches being located on each side of the insulation trench and sharing a trench wall with the insulation trench respectively, the insulation trench being filled with insulation material as an insulation structure, the metal trenches being filled with metal material as electrodes of the capacitor.
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