US Patent 7894657 Wafer center finding
Patent 7894657 was granted and assigned to Brooks Automation on February, 2011 by the United States Patent and Trademark Office.
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Patent abstract
A number of wafer center finding methods and systems are disclosed herein that improve upon existing techniques used in semiconductor manufacturing.
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US Patent 07894657 Wafer center finding US Patent 7894657 Wafer center finding
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Patent Number
0789465700
Patent Number
789465700
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
078946570
Date of Patent
February 22, 2011
0Patent Application Number
120323410
Date Filed
February 15, 2008
0Official Website
Patent Primary Examiner
Edits on 6 Oct, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
078946570
Date of Patent
February 22, 2011
0Patent Application Number
120323410
Date Filed
February 15, 2008
0Official Website
Patent Primary Examiner
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US Patent 07894657 Wafer center finding
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07894657
Date of patent
February 22, 2011
Patent application number
12032341
Date Filed
February 15, 2008
Patent primary examiner
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