US Patent 7892935 Semiconductor process

Patent 7892935 was granted and assigned to United Microelectronics Corporation on February, 2011 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7892935

Patent Inventor Names

Yu-Lan Chang0

Tsai-Fu Hsiao0

Tsung-Yu Hung0

Yi-Wei Chen0

Chao-Ching Hsieh0

Chun-Chieh Chang0

Date of Patent

February 22, 2011

Patent Application Number

11564850

Date Filed

November 30, 2006

Patent Primary Examiner

‌

Long K. Tran

Patent abstract

A semiconductor process is provided. The semiconductor process includes providing a substrate. Then, a surface treatment is performed to the substrate to form a buffer layer on the substrate. Next, a first pre-amorphous implantation is performed to the substrate.