Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
February 1, 2011
Patent Application Number
11508074
Date Filed
August 22, 2006
Patent Primary Examiner
Patent abstract
Provided herein are hardmask compositions for resist underlayer films, wherein according to some embodiments of the invention, hardmask compositions include a polymer prepared by the reaction of a compound of Formula 1
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