US Patent 7878213 Substrate processing apparatus

Patent 7878213 was granted and assigned to Dainippon Screen Mfg Co on February, 2011 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Dainippon Screen Mfg Co

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7878213

Patent Inventor Names

Ichiro Mitsuyoshi0

Date of Patent

February 1, 2011

Patent Application Number

11958996

Date Filed

December 18, 2007

Patent Primary Examiner

‌

Michael Cleveland

Patent abstract

A reversing unit includes a fixed plate, a first movable plate provided so as to face one surface of the fixed plate, a second movable plate provided so as to face the other surface of the fixed plate and a rotary actuator. The rotary actuator rotates the first movable plate, the second movable plate and the fixed plate around a horizontal axis. A distance between the first movable plate and the fixed plate and a distance between the second movable plate and the fixed plate are set to be substantially equal to a difference in height between two hands of a main robot that carry a substrate in and out.