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US Patent 7876457 Laser metrology system and method

Patent 7876457 was granted and assigned to Nikon Metrology on January, 2011 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
Nikon Metrology
Nikon Metrology
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
78764570
Patent Inventor Names
Kurt D. Rueb0
Date of Patent
January 25, 2011
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Patent Application Number
121385860
Date Filed
June 13, 2008
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Patent Primary Examiner
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Tarifur Chowdhury
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Patent abstract

A laser metrology system for determining a location of a target utilizes a laser projector having a laser source for projecting a laser beam. A rotating head directs the laser beam in a lateral direction. A sensor associated with the laser projector is capable of sensing the laser beam. A reflective target is configured to reflect the laser beam projector from the laser source toward the sensor in a manner indicative of the angle of the rotating head and the pulse of the laser beam to determine location of the target.

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