Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert D. Miller0
Gregory M. Wallraff0
John A. Hoffnagle0
Libor Vycklicky0
David R. Medeiros0
Date of Patent
January 25, 2011
0Patent Application Number
116981820
Date Filed
January 25, 2007
0Patent Primary Examiner
Patent abstract
Compositions comprising photobleachable organic materials can be bleached by 193 nm light, and brought back to their original state by stimuli after exposure. (reversible photobleaching). We use these compositions in art-known contrast enhancement layers and as a part of a photoresist, especially in optical lithography processes for semiconductor fabrication. They may comprise polymers such as organo-silicon polymers, polymers comprising polymers of aromatic hydroxyl compounds such as phenol and naphthol such as phenol formaldehyde polymers and naphthol formaldehyde polymers styrene polymers and phenolic acrylate polymers or cyclic materials comprising:
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