Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 18, 2011
Patent Application Number
11889065
Date Filed
August 8, 2007
Patent Primary Examiner
Patent abstract
A source configured to generate radiation for a lithographic apparatus is disclosed. The source includes an anode, and a cathode. The cathode and the anode are configured to create a discharge in a fuel in a discharge space between the anode and the cathode so as to generate a plasma, the cathode and the anode positioned relative to each other so that, in use, current lines extending between the anode and the cathode are substantially curved so as to create a force that substantially radially compresses the plasma only in a region proximate an upper surface of the cathode or of the anode.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
