US Patent 7867303 Cerium oxide abrasive and method of polishing substrates
Patent 7867303 was granted and assigned to Hitachi on January, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 16, 2006
0
Date of Patent
January 11, 2011
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Patent Application Number
11276161
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Patent Inventor Names
Kiyohito Tanno
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Toranosuke Ashizawa
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Masato Yoshida
0
Yuuto Ootuki
0
Yasushi Kurata
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Hiroki Terazaki
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Jun Matsuzawa
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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