Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Asif Aziz Godil0
Date of Patent
January 4, 2011
0Patent Application Number
120740270
Date Filed
March 1, 2008
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention combines electrostatic comb with parallel plate actuation in a novel design to create a robust low voltage MEMS Micromirror. Other unique advantages of the invention include the ability to close the comb fingers for additional reliability and protection during mirror snapping with over voltage.
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