Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Vikram Singh0
George D. Papasouliotis0
Heyun Yin0
Date of Patent
January 4, 2011
Patent Application Number
12760249
Date Filed
April 14, 2010
Patent Primary Examiner
Patent abstract
A first species and a second species are implanted into a conductor of a substrate, which may be copper. The first species and second species may be implanted sequentially or at least partly simultaneously. Diffusion of the first species within the conductor of the substrate is prevented by the presence of the second species. In one particular example, the first species is silicon and the second species is nitrogen, although other combinations are possible.
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