Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthias Aikele0
Bernhard Schmid0
Helmut Seidel0
Marcus Frey0
Albert Engelhardt0
Date of Patent
January 4, 2011
Patent Application Number
10527789
Date Filed
September 12, 2003
Patent Primary Examiner
Patent abstract
To form an isolation structure in a semiconductor substrate, at least two trenches are formed with a rib therebetween in the semiconductor substrate, and then the semiconductor material in the area of the trenches and particularly the rib is converted to an electrically insulating material. For example, this is accomplished by thermal oxidation of silicon semiconductor material of the rib.
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