Is a
Patent attributes
Current Assignee
0
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hiroyoshi Miyano0
Date of Patent
December 28, 2010
0Patent Application Number
117185480
Date Filed
November 4, 2005
0Patent Primary Examiner
Patent abstract
The present invention has an object of realizing a defect inspection estimated at high accuracy by preparing a reference image that reflects the change of the blur with time from a sampled image and design data. The present invention comprises a point spread function estimating section 23 for estimating a point spread function from an observation image and design information, a convolution image generating section 31 for generating a convolution image by convoluting the point spread function relative to the design information and a reference image generating section 33 for generating a reference image from the convolution image obtained by the convolution image generating section. binary image relative to “chromium on quartz glass”.
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