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US Patent 7858479 Method and apparatus of fabricating semiconductor device

Patent 7858479 was granted and assigned to Panasonic on December, 2010 by the United States Patent and Trademark Office.

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Edits on 31 Oct, 2023
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edited on 31 Oct, 2023
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Patent abstract

An object is to provide a semiconductor device in which uniform properties are intended and high yields are provided. Process steps are provided in which variations are adjusted in doping and annealing process steps that are subsequent process steps so as to cancel in-plane variations in a substrate caused by dry etching to finally as well provide excellent in-plane consistency in a substrate.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0785847900
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edited on 21 May, 2023
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US Patent 07858479 Method and apparatus of fabricating semiconductor device US Patent 7858479 Method and apparatus of fabricating semiconductor device

Infobox
Patent Number
0785847900
Patent Number
785847900
Edits on 28 Mar, 2023
"Entity importer update"
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Golden AI
edited on 28 Mar, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
Panasonic
Panasonic
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
078584790
Date of Patent
December 28, 2010
0
Patent Application Number
115963720
Date Filed
May 12, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078584790
Patent Primary Examiner
‌
Alexander G Ghyka
0
Edits on 28 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 28 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Panasonic
Panasonic
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
078584790
Date of Patent
December 28, 2010
0
Patent Application Number
115963720
Date Filed
May 12, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=078584790
Patent Primary Examiner
‌
Alexander G Ghyka
0
Edits on 4 Jun, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 4 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07858479
Edits on 6 Dec, 2021
"Created via: Entity Importer"
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Golden AI
created this topic on 6 Dec, 2021
Edits made to:
Infobox (+8 properties)
‌

 US Patent 07858479 Method and apparatus of fabricating semiconductor device

Infobox
Is a
Patent
Patent
Current assignee
Panasonic
Panasonic
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07858479
Date of patent
December 28, 2010
Patent application number
11596372
Date Filed
May 12, 2005
Patent primary examiner
‌
Alexander G Ghyka

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