US Patent 7857982 Methods of etching features into substrates
Patent 7857982 was granted and assigned to Micron Technology on December, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 19, 2005
1
Date of Patent
December 28, 2010
1
Patent Application Number
11185229
1
Patent Inventor Names
Aaron R. Wilson
1
Tony Schrock
1
Mirzafer Abatchev
1
Gurtej S. Sandhu
1
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Patent Number
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