US Patent 7857982 Methods of etching features into substrates
Patent 7857982 was granted and assigned to Micron Technology on December, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 19, 2005
0
Date of Patent
December 28, 2010
0
Patent Application Number
11185229
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Patent Inventor Names
Aaron R. Wilson
0
Tony Schrock
0
Mirzafer Abatchev
0
Gurtej S. Sandhu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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