Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lyn M. Irving0
Diane C. Freeman0
Shelby F. Nelson0
Peter J. Cowdery-Corvan0
Carolyn R. Ellinger0
David H. Levy0
Date of Patent
December 14, 2010
0Patent Application Number
118614910
Date Filed
September 26, 2007
0Patent Primary Examiner
Patent abstract
The present invention relates to a process of making thin film electronic components and devices, such as thin film transistors, environmental barrier layers, capacitors, insulators and bus lines, where most or all of the layers are made by an atmospheric atomic layer deposition process.
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