US Patent 7851247 Method of fabricating micro-electromechanical system microphone structure
Patent 7851247 was granted and assigned to United Microelectronics Corporation on December, 2010 by the United States Patent and Trademark Office.
Is a
Date Filed
September 15, 2008
Date of Patent
December 14, 2010
Patent Application Number
12211085
Patent Inventor Names
Hui-Shen Shih
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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