Patent attributes
In a vacuum valve composed of a main valve portion that opens and closes a vale seat in a flow path connecting two ports by a valve member, and an operating portion that performs an opening and closing operation for the valve member, the housing of the main valve portion is assembled by joining the two port members with a cylindrically shaped housing main body formed by a squeezing process for a plate material made of metal, or a ring-shaped material made of the metal. In an end portion of the housing, a flange-shaped attaching portion that is bent inward is formed. The operating portion is attached onto the attaching portion via a ring-shaped supporting seat member. A sealing member is sandwiched between a ring-shaped supporting plate and the attaching portion. Both ends of a bellows are respectively connected to the supporting plate and the valve member.