Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsutomu Okabe0
Date of Patent
November 30, 2010
0Patent Application Number
115638690
Date Filed
November 28, 2006
0Patent Primary Examiner
Patent abstract
A curtain nozzle is located above an opening portion (10) in a FIMS. A gas curtain formed of inert gas for closing the opening portion is formed. A cover is so provided as to cover a part of the curtain nozzle so as to prevent peripheral gas around an opening of the curtain nozzle from being involved in the gas curtain of the inert gas emitted from the curtain nozzle.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
