US Patent 7834974 Lithographic apparatus and device manufacturing method
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Patent abstract
A gas knife configured to dry a surface in an immersion lithographic apparatus is optimized to remove liquid by ensuring that a pressure gradient is built up in the liquid film on the surface being dried.
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Patent Inventor Names
Christiaan Alexander Hoogendam0
Nicolaas Rudolf Kemper0
Nicolaas Ten Kate0
Sergei Shulepov0
Sjoerd Nicolaas Lambertus Donders0
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US Patent 07834974 Lithographic apparatus and device manufacturing method US Patent 7834974 Lithographic apparatus and device manufacturing method
Infobox
Patent Number
078349740
Patent Number
78349740
Edits on 6 Apr, 2023
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Patent Jurisdiction
Patent Number
078349740
Date of Patent
November 16, 2010
0Patent Application Number
111675520
Date Filed
June 28, 2005
0Official Website
Patent Primary Examiner
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US Patent 07834974 Lithographic apparatus and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07834974
Date of patent
November 16, 2010
Patent application number
11167552
Date Filed
June 28, 2005
Patent primary examiner
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