Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Maximilian Roesch0
Walter Rieger0
Uli Hiller0
Oliver Blank0
Date of Patent
November 16, 2010
0Patent Application Number
120413910
Date Filed
March 3, 2008
0Patent Primary Examiner
Patent abstract
A semiconductor device and method. One embodiments provides a semiconductor substrate having a trench with a sidewall isolation comprising a first isolating material, a field electrode formed in lower portion of the trench, a cover comprising a second material above the field electrode, the second material being selectively etchable to the first isolating material, a gate dielectric on the sidewall in an upper portion of the trench and a gate electrode in the upper portion of the trench.
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