US Patent 7833427 Electron beam etching device and method
Patent 7833427 was granted and assigned to Micron Technology on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 14, 2006
Date of Patent
November 16, 2010
Patent Application Number
11503681
Patent Inventor Names
Gurtej S. Sandhu
0
Mark J. Williamson
0
Neal R. Rueger
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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