US Patent 7829366 Microelectromechanical systems component and method of making same
Patent 7829366 was granted and assigned to Freescale Semiconductor on November, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 29, 2008
1
Date of Patent
November 9, 2010
1
Patent Application Number
12040737
1
Patent Inventor Names
Melvy F. Miller
1
Daniel N. Koury, Jr.
1
Lianjun Liu
1
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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