Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Junjun Liu0
Dorel I. Toma0
Date of Patent
November 9, 2010
0Patent Application Number
118739770
Date Filed
October 17, 2007
0Patent Primary Examiner
Patent abstract
A method of selectively removing a sacrificial material on a substrate is described. The method comprises forming a sacrificial layer on a substrate. Thereafter, the sacrificial layer is selectively decomposed at a temperature less than the temperature required to thermally decompose the sacrificial layer by selectively exposing the sacrificial layer to UV radiation.
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