Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Li-Guo Xu0
Shou-Shan Fan0
Yuan Yao0
Date of Patent
November 2, 2010
0Patent Application Number
115254400
Date Filed
September 22, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of synthesizing silicon wires generally includes the steps of: providing a substrate; forming a copper catalyst particle layer on a top surface of the substrate; heating the reactive device at a temperature of above 450° C. in a flowing protective gas; and introducing a mixture of a protective gas and a silicon-based reactive gas at a temperature of above 450° C. at a pressure of below 700 Torr, thereby forming the silicon wires on the substrate.
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