US Patent 7819080 Substrate processing apparatus and substrate processing method
Patent 7819080 was granted and assigned to Tokyo Electron on October, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 11, 2004
1
Date of Patent
October 26, 2010
1
Patent Application Number
10585975
1
Patent Inventor Names
Yoshio Kimura
1
Akira Miyata
1
Nobuaki Matsuoka
1
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Industry
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