A representative embodiment of the invention provides a MEMS-based safety and arming (S&A) device having a shuttle movably connected to a frame by one or more bowed springs. The device has an electrical path adapted to electrically connect the frame and a contact pad. In the initial state, the electrical path has an electrical break. If the inertial force acting upon the shuttle (e.g., during launch) reaches or exceeds a first threshold value, then displacement of the shuttle with respect to the frame causes the electrical break to close. If the inertial force reaches or exceeds a second threshold value greater than the first threshold value, then a latching mechanism employed in the S&A device latches to keep the electrical break irreversibly closed thereafter.