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US Patent 7804068 Determining dopant information

Patent 7804068 was granted and assigned to ALIS Corporation on September, 2010 by the United States Patent and Trademark Office.

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Current Assignee
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ALIS Corporation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7804068
Date of Patent
September 28, 2010
Patent Application Number
11853471
Date Filed
September 11, 2007
Patent Primary Examiner
Jack I. Berman
Jack I. Berman
Patent abstract

Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both.

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