Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
September 28, 2010
Patent Application Number
11853471
Date Filed
September 11, 2007
Patent Primary Examiner
Patent abstract
Methods that include using a noble gas ion beam to determine dopant information for a sample are disclosed, the dopant information including dopant concentration in the sample, dopant location in the sample, or both.
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