US Patent 7800761 Infrared interferometric-spatial-phase imaging using backside wafer marks
Patent 7800761 was granted and assigned to Massachusetts Institute of Technology on September, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 12, 2007
Date of Patent
September 21, 2010
Patent Application Number
11734402
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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