Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 21, 2010
Patent Application Number
11814228
Date Filed
January 24, 2006
Patent Primary Examiner
Patent abstract
An electronic emission device emitting plural beams of electrons and including a first structure of a plurality of electron beam emission micro-sources, and a second structure opposite the first structure for collecting electrons emitted by the first structure and for carrying out a secondary emission following the collection. The device can be applied in particular to the field of direct writing lithography.
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