Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshinori Morisada0
Hiroki Arai0
Naoto Tsuji0
Tamihiro Kobayashi0
Hideaki Fukuda0
Date of Patent
September 21, 2010
Patent Application Number
11061986
Date Filed
February 18, 2005
Patent Primary Examiner
Patent abstract
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
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