Patent attributes
The high vacuum valve includes a valve housing having a valve flow channel provided in an interior thereof, two ports connected to the valve housing so as to be arranged perpendicular relative to each other, and capable of being communicated with each other through the valve flow channel, a valve member housed in the valve flow channel for opening and closing the valve flow channel, a valve shaft received in the valve flow channel for causing the valve member to perform opening/closing operations, and an assembly comprising a tubular member and a welded bellows and hermetically surrounding a periphery of the valve shaft, the assembly being fixed at one end portion thereof to a rear face of the valve member and fixed at the other end portion thereof to a portion of the interior of the valve housing which is opposed to the rear face of the valve member.
