Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bruce E. Adams0
Dean Jennings0
Stephen Moffatt0
Timothy N. Thomas0
Date of Patent
September 14, 2010
0Patent Application Number
118689330
Date Filed
October 8, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A laser beam is modulated at a very high frequency to produce uniform radiant flux densities on substrate surface processing regions during thermal processing. Beam modulation is achieved by passing the laser beam through a plasma which causes phase randomization within the laser beam. This method may be used for any application where intense, uniform illumination is desired, such as pulsed laser annealing, ablating, and wafer stepper illuminating.
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