US Patent 7795581 Pattern measuring method and electron microscope
Patent 7795581 was granted and assigned to Hitachi on September, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 27, 2008
Date of Patent
September 14, 2010
Patent Application Number
12038116
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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