Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lee DeBruler0
Date of Patent
September 7, 2010
0Patent Application Number
123992660
Date Filed
March 6, 2009
0Patent Primary Examiner
Patent abstract
In some embodiments, an opening is formed through a first material, and sidewall topography of the opening is utilized to form a pair of separate anisotropically etched spacers. The spacers are utilized to pattern lines in material underlying the spacers. Some embodiments include constructions having one or more openings which contain steep sidewalls joining to one another at shallow sidewall regions. The constructions may also contain lines along and directly against the steep sidewalls, and spaced from one another by gaps along the shallow sidewall regions.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.