Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
William Ralph Knowles0
Marek Uncovsky0
Milos Toth0
Date of Patent
September 7, 2010
0Patent Application Number
120598500
Date Filed
March 31, 2008
0Patent Primary Examiner
Patent abstract
A novel detector for a charged particle beam system which includes multiple gas amplification stages. The stages are typically defined by conductors to which voltage are applied relative to the sample or to a previous stage. By creating cascades of secondary electrons in multiple stages, the gain can be increased without causing dielectric breakdown of the gas.
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