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US Patent 7788627 Lithography verification using guard bands

Patent 7788627 was granted and assigned to LUMINESCENT TECHNOLOGIES, INC. on August, 2010 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

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LUMINESCENT TECHNOLOGIES, INC.

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7788627

Patent Inventor Names

Christopher James Ashton0

Daniel S. Abrams0

Date of Patent

August 31, 2010

Patent Application Number

11538290

Date Filed

October 3, 2006

Patent Primary Examiner

Jack Chiang

Patent abstract

A method for verifying a lithographic process is described. During the method, a set of guard bands are defined around a target pattern that is to be printed on a semiconductor die using a photo-mask in the lithographic process. An estimated pattern is calculated using a model of the lithographic process. This model of the lithographic process includes a mask pattern corresponding to the photo-mask and a model of an optical path. Then, whether or not positions of differences between the estimated pattern and the target pattern exceeded one or more guard bands in the set of guard bands is determined.