US Patent 7786437 Pattern inspection method and pattern inspection system
Patent 7786437 was granted and assigned to Hitachi on August, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 7, 2008
0
Date of Patent
August 31, 2010
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Patent Application Number
12188096
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Patent Inventor Names
Koji Arai
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Yasunari Souda
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Yasutaka Toyoda
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Yuji Takagi
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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