Patent attributes
The substrate treatment method includes: a cleaning step of supplying deionized water to a major surface of a substrate to clean the substrate; a pre-drying treatment step of supplying a pre-drying treatment liquid containing an organic solvent more volatile than the deionized water to the major surface of the substrate after the cleaning step to replace deionized water remaining on the major surface with the pre-drying treatment liquid; and a drying step of removing the pre-drying treatment liquid supplied to the major surface of the substrate after the pre-drying treatment step to dry the substrate. The pre-drying treatment step includes: a deionized water/organic solvent mixture supplying step of supplying a mixture of the deionized water and the organic solvent as the pre-drying treatment liquid to the major surface of the substrate; and a mixing ratio changing step of increasing the proportion of the organic solvent in the mixture of the deionized water and the organic solvent during the deionized water/organic solvent mixture supplying step.
